The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2026
Filed:
Oct. 10, 2018
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Olivier Joubert, Meylan, FR;
Olivier Luere, Sunnyvale, CA (US);
Vedapuram S. Achutharaman, Saratoga, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 4/00 (2016.01); C23C 4/02 (2006.01); C23C 4/10 (2016.01); C23C 4/134 (2016.01); C23C 16/40 (2006.01); C23C 16/44 (2006.01); H01L 21/3065 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01); H10P 50/24 (2026.01); H10P 72/00 (2026.01); H10P 72/76 (2026.01);
U.S. Cl.
CPC ...
H01J 37/32495 (2013.01); C23C 4/00 (2013.01); C23C 4/02 (2013.01); C23C 4/10 (2013.01); C23C 4/134 (2016.01); C23C 16/401 (2013.01); C23C 16/4404 (2013.01); H01J 37/32477 (2013.01); H01J 37/32504 (2013.01); H01J 37/32642 (2013.01); H01J 37/32715 (2013.01); H01J 37/32862 (2013.01); H10P 50/242 (2026.01); H10P 72/0421 (2026.01); H10P 72/7606 (2026.01);
Abstract
A ring assembly for a substrate support is disclosed herein. The ring assembly has a ring shaped body. The ring shaped body has an inner diameter and an outer diameter, a top surface, an inner portion at the inner diameter, and an outer portion at the outer diameter. A carbon based coating is disposed on the top surface of the ring shaped body, wherein the carbon based coating is thicker on the inner portion of the ring shaped body than the outer portion of the ring shaped body.