Company Filing History:
Years Active: 2020-2025
Title: Innovations of Tung-He Chou in Semiconductor Technology
Introduction
Tung-He Chou is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 10 patents. His work focuses on enhancing the performance and efficiency of semiconductor devices.
Latest Patents
One of his latest patents involves a semiconductor device that features a gate electrode with a top peripheral portion and a top central portion. This design includes a protrusion or a depression surrounding the top central portion. Various embodiments of this patent provide a method for forming a recessed gate electrode that ensures high thickness uniformity. The process includes depositing a gate dielectric layer lining a recess, followed by a multilayer film that comprises a gate electrode layer and sacrificial layers. The method involves multiple etching steps to achieve the desired recessed gate electrode configuration.
Another notable patent is related to an integrated aligned stealth laser for the wafer edge trimming process. This invention includes a stealth laser apparatus arranged over a chuck that holds a substrate. An infrared camera is utilized to detect an alignment mark below the substrate, which is crucial for aligning the stealth laser apparatus. The control circuitry operates the stealth laser to create a stealth damage region within the substrate, effectively separating the inner and outer regions.
Career Highlights
Tung-He Chou is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His innovative work has positioned him as a key figure in advancing semiconductor technologies.
Collaborations
He has collaborated with notable colleagues such as Hsun-Chung Kuang and Ming-Tung Wu, contributing to various projects that enhance semiconductor manufacturing processes.
Conclusion
Tung-He Chou's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor in the industry. His work continues to shape the future of semiconductor devices and manufacturing techniques.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.