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For the Inventor, By the Inventor

Tainan, Taiwan

Tang-Kuei Chang

USPTO Granted Patents = 14 

Average Co-Inventor Count = 8.1

ph-index = 2

Forward Citations = 18(Granted Patents)


Company Filing History:

goldMedal14 out of 40,635 
 
Taiwan Semiconductor Manufacturing Comp. Ltd.
 patents

Years Active: 2016-2025

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14 patents (USPTO):
1. 12297375 - Slurry composition and method for polishing and integrated circuit (2025-05-13),
2. 12068195 - Metal loss prevention using implantation (2024-08-20),
3. 12002684 - Methods for chemical mechanical polishing and forming interconnect structure (2024-06-04),
4. 11710659 - Metal loss prevention using implantation (2023-07-25),
5. 11658065 - Chemical mechanical polishing slurry composition, method for chemical mechanical polishing and method for forming connecting structure (2023-05-23),
6. 11532514 - Structure and formation method of semiconductor device with conductive feature (2022-12-20),
7. 11508585 - Methods for chemical mechanical polishing and forming interconnect structure (2022-11-22),
8. 11450565 - Ion implant process for defect elimination in metal layer planarization (2022-09-20),
9. 11211289 - Metal loss prevention using implantation (2021-12-28),
10. 10957587 - Structure and formation method of semiconductor device with conductive feature (2021-03-23),
11. 10643892 - Metal loss prevention using implantation (2020-05-05),
12. 9931726 - Wafer edge trimming tool using abrasive tape (2018-04-03),
13. 9829806 - Lithography tool with backside polisher (2017-11-28),
14. 9339912 - Wafer polishing tool using abrasive tape (2016-05-17),

Title: Tang-Kuei Chang: Innovator in Semiconductor Technologies

Introduction

Tang-Kuei Chang is a prominent inventor based in Tainan, Taiwan. He holds an impressive portfolio of 14 patents, showcasing his significant contributions to the field of semiconductor technologies. Chang's innovations have played a crucial role in enhancing the efficiency and effectiveness of integrated circuits.

Latest Patents

Among his latest inventions, one noteworthy patent is a slurry composition and method for polishing integrated circuits. This patent describes a unique slurry composition that includes a liquid carrier, abrasives, and an oxidizer, enhanced with a rheology modifier. This innovative polishing method allows for improved performance in surface finishing of conductive layers.

Another significant patent by Chang is focused on metal loss prevention using implantation. This invention outlines methods for forming conductive features in a dielectric layer without relying on adhesion or barrier layers. It details the structure of a dielectric layer with an implanted species, which optimizes the integration of conductive features in semiconductor devices.

Career Highlights

Tang-Kuei Chang is affiliated with Taiwan Semiconductor Manufacturing Company Limited (TSMC), one of the world's largest semiconductor manufacturers. His work at TSMC has enabled the development of advanced manufacturing processes and has solidified the company's position as a key player in the global semiconductor industry.

Collaborations

In his career, Chang has collaborated with esteemed colleagues, including Kei-Wei Chen and Li-Chieh Wu. These partnerships have further enhanced the innovative output at TSMC, reflecting a strong team dynamic committed to driving advancements in semiconductor technology.

Conclusion

Tang-Kuei Chang exemplifies the spirit of innovation through his extensive patents and contributions to the semiconductor industry. His ongoing work continues to push the boundaries of technology, demonstrating the vital role of inventors in shaping the future of electronics and integrated circuits.

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