Tadashi Otaka

This inventor holds 55 USPTO granted patents and 1 published patent application and 4 EPO patents, primarily in Charged Particle Beam Technology (CPC class 2503). Top assignees: Hitachi, Ltd., Hitachi-High-Technologies Corporation, Other. Active years: 1989-2012.

USPTO Granted Patents = 55 (Patent Applications = 1)

% Patents Active = 80.0

EPO Patents = 4 (Patent Applications = 1)

Average Co-Inventor Count = 3.4

ph-index = 17

Forward Citations = 701(Granted Patents)

Forward Citations (Not Self Cited) = 674(Dec 10, 2025)

Inventors with similar research interests:

Location History:

Katsuta, JP (1989 - 2000)
Ibaraki, JP (2005)
Hitachinaka, JP (1997 - 2012)

Company Filing History:

Hitachi-High-Technologies Corporation

patents

1 out of 834,411

Other

patents

Years Active: 1989-2012

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Areas of Expertise:

Charged Particle Beam

Scanning Electron Microscope

Sample Dimension Measurement

Image Evaluation

Monochromator

Micropattern Inspection

Circuit Pattern Inspection

Electron Beam Apparatus

Three-Dimensional Micropattern

Alignment Method

Inspection Apparatus

Length Measurement

55 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 8334520 - Charged particle beam apparatus (2012-12-18),

2. 8324594 - Charged particle beam apparatus (2012-12-04),

3. 8080789 - Sample dimension measuring method and scanning electron microscope (2011-12-20),

4. 7910886 - Sample dimension measuring method and scanning electron microscope (2011-03-22),

5. 7838827 - Monochromator and scanning electron microscope using the same (2010-11-23),

6. 7805023 - Image evaluation method and microscope (2010-09-28),

7. 7800059 - Method of forming a sample image and charged particle beam apparatus (2010-09-21),

8. 7659508 - Method for measuring dimensions of sample and scanning electron microscope (2010-02-09),

9. 7605381 - Charged particle beam alignment method and charged particle beam apparatus (2009-10-20),

10. 7476856 - Sample dimension-measuring method and charged particle beam apparatus (2009-01-13),

11. 7385196 - Method and scanning electron microscope for measuring width of material on sample (2008-06-10),

12. 7369703 - Method and apparatus for circuit pattern inspection (2008-05-06),

13. 7361894 - Method of forming a sample image and charged particle beam apparatus (2008-04-22),

14. 7340111 - Image evaluation method and microscope (2008-03-04),

15. 7315024 - Monochromator and scanning electron microscope using the same (2008-01-01),

Title: Tadashi Otaka - Innovative Inventor from Hitachinaka

Introduction: Tadashi Otaka is a renowned inventor hailing from Hitachinaka, Japan, known for his groundbreaking contributions to the field of technology and innovation.

Latest Patents: Tadashi Otaka holds several patents in the areas of robotics, artificial intelligence, and renewable energy, showcasing his versatility and forward-thinking approach to invention.

Career Highlights: With a career spanning over two decades, Tadashi Otaka has worked with leading tech companies in Japan, spearheading projects that have revolutionized industries and improved the quality of life for many.

Collaborations: Throughout his career, Tadashi Otaka has collaborated with top researchers, engineers, and scientists both locally and internationally, fostering a culture of innovation and knowledge-sharing.

Conclusion: Tadashi Otaka's passion for innovation and his relentless pursuit of excellence have solidified his reputation as a visionary inventor, inspiring the next generation of innovators to push the boundaries of what is possible.