The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2008
Filed:
Aug. 05, 2004
Goroku Shimoma, Minori, JP;
Tadashi Otaka, Hitachinaka, JP;
Mitsugu Sato, Hitachinaka, JP;
Hideo Todokoro, Hinode, JP;
Shunichi Watanabe, Hitachinaka, JP;
Tadanori Takahashi, Hitachinaka, JP;
Masahiro Kawawa, Hitachinaka, JP;
Masanori Gunji, Hitachinaka, JP;
Terumichi Nishino, Johoku, JP;
Goroku Shimoma, Minori, JP;
Tadashi Otaka, Hitachinaka, JP;
Mitsugu Sato, Hitachinaka, JP;
Hideo Todokoro, Hinode, JP;
Shunichi Watanabe, Hitachinaka, JP;
Tadanori Takahashi, Hitachinaka, JP;
Masahiro Kawawa, Hitachinaka, JP;
Masanori Gunji, Hitachinaka, JP;
Terumichi Nishino, Johoku, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A width-measurement method of reducing or eliminating an error in measurement of a width of an object on a sample resulting from the dimension of the beam diameter, wherein a width-measured value of the object to be width-measured which has been obtained on the basis of a secondary signal obtained from secondary particles emitted from the sample having thereon the object to be width-measured is corrected with a value with respect to a dimension value of a beam diameter.