The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 21, 2010
Filed:
Mar. 04, 2008
Mitsugu Sato, Hitachinaka, JP;
Atsushi Takane, Mito, JP;
Takashi Iizumi, Hitachinaka, JP;
Tadashi Otaka, Hitachinaka, JP;
Hideo Todokoro, Hinode, JP;
Satoru Yamaguchi, Hitachinaka, JP;
Kazutaka Nimura, Nagoya, JP;
Mitsugu Sato, Hitachinaka, JP;
Atsushi Takane, Mito, JP;
Takashi Iizumi, Hitachinaka, JP;
Tadashi Otaka, Hitachinaka, JP;
Hideo Todokoro, Hinode, JP;
Satoru Yamaguchi, Hitachinaka, JP;
Kazutaka Nimura, Nagoya, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
An object of the present invention is to provide a sample image forming method and a charged particle beam apparatus which are suitable for realizing suppressing of the view area displacement with high accuracy while the influence of charging due to irradiation of the charged particle beam is being suppressed. In order to attain the above object, the present invention provide a method of forming a sample image by scanning a charged particle beam on a sample and forming an image based on secondary signals emitted from the sample, the method comprising the steps of forming a plurality of composite images by superposing a plurality of images obtained by a plurality of scanning times; and forming a further composite image by correcting positional displacements among the plurality of composite images and superposing the plurality of composite images, and a charged particle beam apparatus for realizing the above method.