Siyi Li

Title: The Innovative Mind of Siyi Li

Introduction

Siyi Li, based in Fremont, CA, is a notable inventor with a remarkable portfolio of 10 patents to his name. His innovations primarily focus on advanced methods for etching and forming via holes in semiconductor layers, showcasing his significant contributions to the field of technology and manufacturing.

Latest Patents

Among Siyi Li's latest patents is a groundbreaking method for providing vias. This invention details a unique approach to forming via holes in an etch layer beneath a patterned organic mask that has multiple patterned via holes. The process involves treating the mask with a treatment gas containing hydrogen, followed by the formation of a plasma to round the patterned via holes, which are subsequently transferred into the etch layer.

Another notable patent is related to the silicon-on-insulator etching process. This patent describes a sophisticated method of etching features through a layered structure of silicon nitride, silicon, and silicon oxide within a plasma processing chamber. The technique includes flowing specific etch gases and forming them into plasma to effectively etch each layer, highlighting the precision required in semiconductor manufacturing.

Career Highlights

Siyi Li has accumulated valuable experience working with esteemed companies in the industry, including Lam Research Corporation and Applied Materials, Inc. His roles in these organizations have allowed him to hone his expertise and further his innovative ideas in semiconductor processing technologies.

Collaborations

Throughout his career, Siyi has collaborated with notable colleagues, including Sean S. Kang and Helen H. Zhu. These partnerships have enabled him to push the boundaries of innovation and explore new avenues in technology development.

Conclusion

With a strong background in semiconductor technology and a passion for innovation, Siyi Li continues to make significant contributions to the field. His patents not only reflect his technical expertise but also his commitment to advancing the industry, solidifying his status as a prominent inventor in today's technological landscape.