The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 2010
Filed:
Dec. 08, 2006
Zhilin Huang, San Jose, CA (US);
Siyi LI, Fremont, CA (US);
Gerardo A. Delgadino, Santa Clara, CA (US);
Zhilin Huang, San Jose, CA (US);
Siyi Li, Fremont, CA (US);
Gerardo A. Delgadino, Santa Clara, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Methods for removing a BARC layer from a feature are provided in the present invention. In one embodiment, the method includes providing a substrate having a feature filled with a BARC layer in an etching chamber, supplying a first gas mixture comprising NHgas into the chamber to etch a first portion of the BARC layer filling in the feature, and supplying a second gas mixture comprising Ogas into the etching chamber to etch the remaining portion of the BARC layer disposed in the feature.