Beaverton, OR, United States of America

Shankar Swaminathan

This inventor holds 68 USPTO granted patents and 6 published patent applications, primarily in Atomic Layer Deposition (CPC class H01L). Top assignees: Lam Research Corporation, Novellus Systems Incorporated, Other. Active years: 2014-2025.

USPTO Granted Patents = 68 

% Patents Active = 97.1

Average Co-Inventor Count = 4.4

ph-index = 22

Forward Citations = 3,822(Granted Patents)

Forward Citations (Not Self Cited) = 3,382(Dec 10, 2025)


Inventors with similar research interests:


Location History:

  • Hillsboro, OR (US) (2014 - 2018)
  • Beaverton, CA (US) (2018)
  • Beaverton, OR (US) (2015 - 2024)

Company Filing History:


Years Active: 2014-2025

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Areas of Expertise:
Atomic Layer Deposition
Plasma Suppression
Substrate Processing
Chemical Delivery
Film Uniformity
Semiconductor Patterning
3-D IC Transistors
Gapfill Applications
CVD Dielectrics
Porous Baffle
Conical Showerheads
Edge Impedance Modulation
68 patents (USPTO):Explore Patents

Title: Shankar Swaminathan: Pioneering Innovator Shaping the Future

Introduction:

Shankar Swaminathan is a prominent figure in the world of inventors, known for his dedication to innovation and relentless pursuit of excellence. Based in Beaverton, Oregon (US), his contributions have not only shaped the future of technology but also inspired others to push the boundaries of what is possible.

Latest Patents:

Among his numerous patents, Shankar Swaminathan's latest inventions are Fill on Demand Ampoule Refill and Planar Substrate Edge Contact with Open Volume Equalization Pathways and Side Containment. These inventions revolutionize deposition processes in substrate processing systems, increasing efficiency and optimizing precursor control.

Career Highlights:

With an impressive portfolio of 67 patents, Shankar Swaminathan has made significant strides in the field of technology. Having worked at companies like Lam Research Corporation and Novellus Systems Incorporated, his expertise and innovative thinking have driven advancements in semiconductor manufacturing and beyond.

Collaborations:

Throughout his career, Shankar Swaminathan has collaborated with talented individuals such as Adrien Lavoie and Frank Loren Pasquale. These partnerships have resulted in groundbreaking inventions and further solidified his reputation as a pioneering innovator.

Conclusion:

In conclusion, Shankar Swaminathan's impact on the world of technology is undeniable. His passion for innovation, coupled with his drive for excellence, continues to shape the landscape of invention. As a standout figure among inventors, Shankar Swaminathan's legacy will undoubtedly inspire future generations to pursue innovation and discovery.

Profile summary based on public USPTO records.
Please report any incorrect information to [email protected]
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