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For the Inventor, By the Inventor

Beaverton, OR, United States of America

Shankar Swaminathan

USPTO Granted Patents = 68 

Average Co-Inventor Count = 4.4

ph-index = 22

Forward Citations = 3,764(Granted Patents)


Inventors with similar research interests:


Location History:

  • Hillsboro, OR (US) (2014 - 2018)
  • Beaverton, CA (US) (2018)
  • Beaverton, OR (US) (2015 - 2024)

Company Filing History:

goldMedal51 out of 3,768 
 
Lam Research Corporation
 patents
silverMedal16 out of 993 
 
Novellus Systems Incorporated
 patents
bronzeMedal1 out of 832,680 
Other
 patents

Years Active: 2014-2025

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68 patents (USPTO):
1. 12261038 - Gapfill of variable aspect ratio features with a composite PEALD and PECVD method (2025-03-25),
2. 11959175 - Fill on demand ampoule refill (2024-04-16),
3. 11443975 - Planar substrate edge contact with open volume equalization pathways and side containment (2022-09-13),
4. 11133180 - Gapfill of variable aspect ratio features with a composite PEALD and PECVD method (2021-09-28),
5. 11127567 - Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity (2021-09-21),
6. 11120989 - Systems and methods for UV-based suppression of plasma instability (2021-09-14),
7. 11072860 - Fill on demand ampoule refill (2021-07-27),
8. 11011379 - Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors (2021-05-18),
9. 10840061 - Substrate processing chamber including conical surface for reducing recirculation (2020-11-17),
10. 10741458 - Methods for depositing films on sensitive substrates (2020-08-11),
11. 10741365 - Low volume showerhead with porous baffle (2020-08-11),
12. 10665429 - Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity (2020-05-26),
13. 10648079 - Reducing backside deposition at wafer edge (2020-05-12),
14. 10629435 - Doped ALD films for semiconductor patterning applications (2020-04-21),
15. 10622243 - Planar substrate edge contact with open volume equalization pathways and side containment (2020-04-14),

Title: Shankar Swaminathan: Pioneering Innovator Shaping the Future

Introduction:

Shankar Swaminathan is a prominent figure in the world of inventors, known for his dedication to innovation and relentless pursuit of excellence. Based in Beaverton, Oregon (US), his contributions have not only shaped the future of technology but also inspired others to push the boundaries of what is possible.

Latest Patents:

Among his numerous patents, Shankar Swaminathan's latest inventions are Fill on Demand Ampoule Refill and Planar Substrate Edge Contact with Open Volume Equalization Pathways and Side Containment. These inventions revolutionize deposition processes in substrate processing systems, increasing efficiency and optimizing precursor control.

Career Highlights:

With an impressive portfolio of 67 patents, Shankar Swaminathan has made significant strides in the field of technology. Having worked at companies like Lam Research Corporation and Novellus Systems Incorporated, his expertise and innovative thinking have driven advancements in semiconductor manufacturing and beyond.

Collaborations:

Throughout his career, Shankar Swaminathan has collaborated with talented individuals such as Adrien Lavoie and Frank Loren Pasquale. These partnerships have resulted in groundbreaking inventions and further solidified his reputation as a pioneering innovator.

Conclusion:

In conclusion, Shankar Swaminathan's impact on the world of technology is undeniable. His passion for innovation, coupled with his drive for excellence, continues to shape the landscape of invention. As a standout figure among inventors, Shankar Swaminathan's legacy will undoubtedly inspire future generations to pursue innovation and discovery.

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