Company Filing History:
Years Active: 2000-2013
Title: Semyon L Kats: Innovator in Plasma Technology
Introduction
Semyon L Kats is a prominent inventor based in San Francisco, CA, known for his significant contributions to plasma technology. With a total of 16 patents to his name, he has made remarkable advancements in the field of substrate processing.
Latest Patents
Among his latest patents is a cathode with inner and outer electrodes at different heights. This innovative apparatus is designed for generating uniform plasma across and beyond the peripheral edge of a substrate. It features a dielectric body with an upper electrode and an annular electrode embedded within it. The outer perimeter of the upper electrode overlaps the inner perimeter of the annular electrode. In one embodiment, the upper electrode and the annular electrode are electrically coupled by molybdenum vias. The upper electrode is coupled to a DC power source to provide electrostatic force for chucking the substrate. Additionally, it is connected to an RF source for exciting one or more processing gases into plasma for substrate processing.
Another notable patent is a substrate support having a fluid channel. This support for a substrate processing chamber comprises a chuck with a substrate receiving surface. The base includes an upper wall with a recessed trench that has an attachment face at a first depth and a fluid channel at a second depth. A lower wall is seated in the recessed trench and attached to the attachment face of the upper wall, effectively closing the fluid channel. A fluid inlet is provided to supply a heat transfer fluid to the fluid channel, while a fluid outlet is available to discharge the heat transfer fluid from the fluid channel.
Career Highlights
Semyon L Kats is currently employed at Applied Materials, Inc., where he continues to innovate and develop new technologies in the field of plasma processing. His work has significantly impacted the efficiency and effectiveness of substrate processing techniques.
Collaborations
He has collaborated with notable coworkers such as Arnold Kholodenko and Shamouil Shamouilian, contributing to various projects and advancements in their field.
Conclusion
Semyon L Kats is a distinguished inventor whose work in plasma technology has led to numerous patents and innovations. His contributions continue to shape the future of substrate processing, making him a key figure in the industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.