The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2002
Filed:
May. 07, 1999
Shamouil Shamouilian, San Jose, CA (US);
You Wang, Cupertino, CA (US);
Surinder S. Bedi, Fremont, CA (US);
Arnold Kholodenko, San Francisco, CA (US);
Alexander M. Veytser, Mountain View, CA (US);
Kadthala R. Narendrnath, San Francisco, CA (US);
Semyon L. Kats, San Francisco, CA (US);
Dennis S. Grimard, Ann Arbor, MI (US);
Wing L. Cheng, Sunnyvale, CA (US);
Ananda H. Kumar, Milpitas, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An electrostatic chuck comprises an electrical connector which is connected to the electrode to conduct an electrical charge to the electrode The electrical connector comprises a refractory metal having a melting temperature of at least about 1500° C., such as for example, tungsten, titanium, nickel, tantalum, molybdenum, or alloys thereof. Preferably, the electrical connector is bonded to the electrode by a metal having a softening temperature of less than about 600° C., such as aluminum, indium, or low melting point alloys.