The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2002
Filed:
Aug. 13, 2001
You Wang, Cupertino, CA (US);
Shamouil Shamouilian, San Jose, CA (US);
Arnold Kholodenko, San Francisco, CA (US);
Alexander M. Veytser, Mountain View, CA (US);
Surinder S. Bedi, Fremont, CA (US);
Kadthala R. Narendrnath, San Jose, CA (US);
Semyon L. Kats, San Francisco, CA (US);
Dennis S. Grimard, Ann Arbor, MI (US);
Wing L. Cheng, Sunnyvale, CA (US);
Ananda H. Kumar, Milpitas, CA (US);
Applied Materials Inc., Santa Clara, CA (US);
Abstract
An electrostatic chuck for holding a substrate has an electrostatic member having a dielectric covering an electrode that is chargeable to electrostatically hold the substrate. The bond layer has a metal layer that is infiltrated or brazed between the electrostatic member and the base. The base may be a composite of a ceramic and metal, the composite having a coefficient of thermal expansion within about ±30% of a coefficient of thermal expansion of the electrostatic member. The base may also have a heater.