The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2003
Filed:
Nov. 05, 2001
You Wang, Cupertino, CA (US);
Shamouil Shamouilian, San Jose, CA (US);
Arnold Kholodenko, San Francisco, CA (US);
Alexander M. Veytser, Mountain View, CA (US);
Surinder S. Bedi, Fremont, CA (US);
Kadthala R. Narendrnath, San Jose, CA (US);
Semyon L. Kats, San Francisco, CA (US);
Dennis S. Grimard, Ann Arbor, MI (US);
Wing L. Cheng, Sunnyvale, CA (US);
Ananda H. Kumar, Milpitas, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An electrostatic chuck for holding a substrate comprises an electrostatic member made from a dielectric covering an electrode that is chargeable to electrostatically hold the substrate A base that includes a heater is joined to the electrostatic member The base may be made from a composite material, such as a porous ceramic infiltrated with the metal, and may be joined to the electrostatic member by a bond layer.