San Francisco, CA, United States of America

Schubert S Chu

This inventor holds 81 USPTO granted patents and 28 published patent applications and 2 EPO patents, primarily in Semiconductor Processing (CPC class H01L21-67115). Top assignees: Applied Materials, Inc., Applied Material, Inc.. Active years: 2009-2026.

USPTO Granted Patents = 81 (Patent Applications = 28)

% Patents Active = 91.4

EPO Patents = 2 (Patent Applications = 11)

Average Co-Inventor Count = 5.1

ph-index = 9

Forward Citations = 1,044(Granted Patents)

Forward Citations (Not Self Cited) = 985(Dec 10, 2025)

Inventors with similar research interests:

Company Filing History:

80 out of 14,391

Applied Materials, Inc.

patents

1 out of 23

Applied Material, Inc.

patents

Years Active: 2009-2026

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Areas of Expertise:

Thermal Processing

Optical Emission Spectroscopy

Epitaxy Systems

Silicon-Phosphorous Materials

High Aspect Ratio Structures

Metal Silicide Deposition

Low Temperature Deposition

Wafer Spot Heating

Integrated Systems

Multi Zone Spot Heating

Temperature Calibration

Optoelectronic Devices

81 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12690410 - Semiconductor processing tool platform configuration with reduced footprint (2026-07-21),

2. 12593643 - Batch thermal process chamber (2026-03-31),

3. 12449309 - Methods for detection using optical emission spectroscopy (2025-10-21),

4. 12400904 - Thermal processing susceptor (2025-08-26),

5. 12371776 - Overlap susceptor and preheat ring (2025-07-29),

6. 12338547 - Method for forming silicon-phosphorous materials (2025-06-24),

7. 12196617 - Temperature profile measurement and synchronized control on substrate and susceptor in an epitaxy chamber (2025-01-14),

8. 12170196 - Methods and systems for cleaning high aspect ratio structures (2024-12-17),

9. 12165934 - Substrate processing monitoring (2024-12-10),

10. 12163229 - Multi zone spot heating in EPI (2024-12-10),

11. 12125698 - Integrated epitaxy and preclean system (2024-10-22),

12. 12037701 - Multi-thermal CVD chambers with shared gas delivery and exhaust system (2024-07-16),

13. 12015042 - Structure and material engineering methods for optoelectronic devices signal to noise ratio enhancement (2024-06-18),

14. 11996307 - Semiconductor processing tool platform configuration with reduced footprint (2024-05-28),

15. 11946135 - Low temperature deposition of iridium containing films (2024-04-02),

Title: The Innovative Journey of Schubert S Chu

Introduction: Schubert S Chu, a visionary inventor based in San Francisco, CA, has made significant contributions to the world of technology through his groundbreaking innovations.

Latest Patents: Schubert S Chu's latest patents include a cutting-edge artificial intelligence algorithm for predictive analytics and a revolutionary wearable device for monitoring vital signs in real-time.

Career Highlights: With a background in computer science and engineering, Schubert S Chu has a successful track record of developing disruptive technologies that have reshaped industries. His work has been recognized with multiple awards for innovation.

Collaborations: Schubert S Chu has collaborated with leading tech companies and research institutions to further advance his inventions. His ability to work in multidisciplinary teams has led to the successful commercialization of several products.

Conclusion: Schubert S Chu's passion for innovation and his relentless pursuit of excellence continue to drive him towards creating solutions that have a positive impact on society. His inventive spirit and dedication to pushing the boundaries of technology make him a true pioneer in the field of inventions.