The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2025
Filed:
Jun. 29, 2020
Applied Materials, Inc., Santa Clara, CA (US);
Zuoming Zhu, Sunnyvale, CA (US);
Shu-Kwan Lau, Sunnyvale, CA (US);
Enle Choo, Saratoga, CA (US);
Ala Moradian, Sunnyvale, CA (US);
Flora Fong-Song Chang, Saratoga, CA (US);
Maxim D. Shaposhnikov, Sunnyvale, CA (US);
Bindusagar Marath Sankarathodi, San Jose, CA (US);
Zhepeng Cong, San Jose, CA (US);
Zhiyuan Ye, San Jose, CA (US);
Vilen K. Nestorov, Pleasanton, CA (US);
Surendra Singh Srivastava, Santa Clara, CA (US);
Saurabh Chopra, Santa Clara, CA (US);
Patricia M. Liu, Saratoga, CA (US);
Errol Antonio C. Sanchez, Tracy, CA (US);
Jenny C. Lin, Saratoga, CA (US);
Schubert S. Chu, San Francisco, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An apparatus for controlling temperature profile of a substrate within an epitaxial chamber includes a bottom center pyrometer and a bottom outer pyrometer to respectively measure temperatures at a center location and an outer location of a first surface of a susceptor of an epitaxy chamber, a top center pyrometer and a top outer pyrometer to respectively measure temperatures at a center location and an outer location of a substrate disposed on a second surface of the susceptor opposite the first surface, a first controller to receive signals, from the bottom center pyrometer and the bottom outer pyrometer, and output a feedback signal to a first heating lamp module that heats the first surface based on the measured temperatures of the first surface, and a second controller to receive signals, from the top center pyrometer, the top outer pyrometer, the bottom center pyrometer, and the bottom outer pyrometer, and output a feedback signal to a second heating lamp module that heats the substrate based on the measured temperatures of a substrate and the measured temperatures of the first surface.