Flora Fong-Song Chang

Title: Flora Fong-Song Chang: Innovator in Semiconductor Technology

Introduction

Flora Fong-Song Chang is a prominent inventor based in Saratoga, CA, known for her significant contributions to semiconductor technology. With a total of 10 patents to her name, she has made remarkable advancements in methods for detection and epitaxial layer formation.

Latest Patents

One of her latest patents is titled "Methods for detection using optical emission spectroscopy." This invention involves delivering an optical signal from a process chamber to an optical emission spectrometer (OES). The OES identifies emission peaks of photons, which correspond to the optical intensity of radiation from the photons, to determine the concentrations of each of the precursor gases and reaction products. The OES sends input signals of the data results to a controller, which can adjust process variables within the process chamber in real time during deposition based on the comparison. Additionally, the controller can automatically trigger a process chamber clean based on a comparison of input signals of process chamber residues received before and after the deposition process.

Another notable patent is the "Method and apparatus for low temperature selective epitaxy in a deep trench." This invention relates to methods for forming epitaxial layers on a semiconductor device. The process includes removing oxides from a substrate surface during a cleaning process, flowing a processing reagent containing a silicon source, and exposing the substrate to the processing reagent during an epitaxy process. The method also involves flowing a purging gas, pumping residues from the processing system, and using an etching gas that contains hydrogen chloride and at least one germanium and/or chlorine compound.

Career Highlights

Flora Fong-Song Chang is currently employed at Applied Materials, Inc., where she continues to innovate in the field of semiconductor manufacturing. Her work has significantly impacted the efficiency and effectiveness of semiconductor processes.

Collaborations

Throughout her career, Flora has collaborated with notable colleagues, including Zhiyuan Ye and Schubert S. Chu. These collaborations have further enhanced her research and development efforts in semiconductor technology.

Conclusion

Flora Fong-Song Chang is a trailblazer in semiconductor innovation, with a strong portfolio of patents that reflect her expertise and dedication to advancing technology. Her contributions continue to shape the future of the semiconductor industry.