Enle Choo

Title: Enle Choo: Innovator in Optical Emission Spectroscopy and Semiconductor Processing

Introduction

Enle Choo is a prominent inventor based in Saratoga, California, known for his significant contributions to the field of optical emission spectroscopy and semiconductor processing. With a total of seven patents to his name, Choo has made remarkable advancements that enhance the efficiency and accuracy of various processes in the semiconductor industry.

Latest Patents

Choo's latest patents include innovative methods for detection using optical emission spectroscopy. This technology involves delivering an optical signal from a process chamber to an optical emission spectrometer (OES). The OES identifies emission peaks of photons, which correspond to the optical intensity of radiation from the photons, allowing for the determination of concentrations of precursor gases and reaction products. The OES sends input signals of the data results to a controller, which can adjust process variables in real time during deposition based on the comparison. Additionally, the controller can automatically trigger a process chamber clean based on a comparison of input signals of process chamber residues received before and after the deposition process.

Another notable patent is the in-situ epi growth rate control of crystal thickness micro-balancing sensor. This method and apparatus for processing semiconductor substrates includes growth monitors within an exhaust system of a deposition chamber. These quartz crystal film thickness monitors measure the film thickness while a substrate is being processed. The monitors are connected to a controller that adjusts the heating apparatus and gas flow settings during processing operations. Measurements from the growth monitors, along with other sensors, are utilized to adjust processing chamber models as substrates are processed.

Career Highlights

Enle Choo is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. His work focuses on developing advanced technologies that improve semiconductor manufacturing processes. Choo's innovative approaches have positioned him as a key figure in the field, contributing to the ongoing evolution of semiconductor technology.

Collaborations

Choo collaborates with talented individuals in his field, including Ala Moradian and Zhiyuan Ye. These partnerships foster a creative environment that encourages the development of groundbreaking technologies and solutions.

Conclusion

Enle Choo's contributions to optical emission spectroscopy and semiconductor processing exemplify the spirit of innovation in the technology sector. His patents reflect a commitment to enhancing manufacturing processes, making him a valuable asset to Applied Materials, Inc. and the broader scientific community.