The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2025
Filed:
Apr. 06, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Shu-Kwan Lau, Sunnyvale, CA (US);
Brian Hayes Burrows, San Jose, CA (US);
Zhiyuan Ye, San Jose, CA (US);
Richard O. Collins, Santa Clara, CA (US);
Enle Choo, Saratoga, CA (US);
Danny D. Wang, San Jose, CA (US);
Shainish Nellikka, Bangalore, IN;
Toshiyuki Nakagawa, Narita, JP;
Abhishek Dube, Fremont, CA (US);
Ala Moradian, Sunnyvale, CA (US);
Kartik Bhupendra Shah, Saratoga, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A process chamber includes a chamber body having a ceiling disposed above a floor with a chassis and an injector ring disposed therebetween. Upper and lower clamp rings secure the upper and floors, respectively, in place. An upper heating module is coupled to the upper clamp ring above the ceiling. A lower heating module is coupled to the lower clamp ring below the floor.