The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2026
Filed:
Apr. 20, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Shu-Kwan Lau, Sunnyvale, CA (US);
Enle Choo, Saratoga, CA (US);
Danny Don Wang, Saratoga, CA (US);
Shainish Nellikka, Bangalore, IN;
Toshiyuki Nakagawa, Narita, JP;
Zhiyuan Ye, San Jose, CA (US);
Abhishek Dube, Fremont, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Apparatus for heating a substrate within a substrate processing chamber are described herein. More specifically, possible lamp modules for use within a substrate processing chamber are described. The lamp modules include a reflector body. The reflector body is a reflective material. The reflector body includes grooves disposed in a surface and configured to direct radiant energy towards a substrate. Each ring includes multiple grooves with different cross sections to allow radiant energy to be directed at different radial positions on the substrate from the same ring. The grooves may be either curved or linear grooves.