Company Filing History:
Years Active: 2023-2025
Title: Innovations of Surendra Singh Srivastava
Introduction
Surendra Singh Srivastava is a notable inventor based in Santa Clara, CA, with a significant contribution to the field of optical emission spectroscopy and epitaxial processes. He holds five patents that showcase his expertise and innovative approach to technology.
Latest Patents
One of his latest patents is titled "Methods for detection using optical emission spectroscopy." This invention involves delivering an optical signal from a process chamber to an optical emission spectrometer (OES). The OES identifies emission peaks of photons, which correspond to the optical intensity of radiation from the photons, allowing for the determination of concentrations of precursor gases and reaction products. The OES sends input signals of the data results to a controller, which can adjust process variables in real time during deposition based on the comparison. Additionally, the controller can automatically trigger a process chamber clean based on a comparison of input signals of process chamber residues received before and after the deposition process.
Another significant patent is "Temperature profile measurement and synchronized control on substrate and susceptor in an epitaxy chamber." This apparatus controls the temperature profile of a substrate within an epitaxial chamber. It includes multiple pyrometers to measure temperatures at various locations on the susceptor and substrate. The system utilizes feedback signals to adjust heating lamp modules, ensuring optimal temperature control during the epitaxial process.
Career Highlights
Surendra Singh Srivastava is currently employed at Applied Materials, Inc., a leading company in the semiconductor and display technology industry. His work has contributed to advancements in manufacturing processes and materials science.
Collaborations
He has collaborated with notable coworkers, including Zuoming Zhu and Ala Moradian, who have also made significant contributions to the field.
Conclusion
Surendra Singh Srivastava's innovative patents and contributions to optical emission spectroscopy and epitaxial processes highlight his role as a leading inventor in the technology sector. His work continues to influence advancements in semiconductor manufacturing and materials science.
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