The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2024
Filed:
Oct. 27, 2020
Applied Materials, Inc., Santa Clara, CA (US);
Ala Moradian, Sunnyvale, CA (US);
Martin A. Hilkene, Gilroy, CA (US);
Zuoming Zhu, Sunnyvale, CA (US);
Errol Antonio C. Sanchez, Santa Clara, CA (US);
Bindusagar Marath Sankarathodi, San Jose, CA (US);
Patricia M. Liu, Saratoga, CA (US);
Surendra Singh Srivastava, Santa Clara, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Systems, apparatus, and methods are disclosed for foreline diagnostics and control. A foreline coupled to a chamber exhaust is instrumented with one or more sensors, in some embodiments placed between the chamber exhaust and an abatement system. The one or more sensors are positioned to measure pressure in the foreline as an indicator of conductance. The sensors are coupled to a trained machine learning model configured to provide a signal when the foreline needs a cleaning cycle or when preventive maintenance should be performed. In some embodiments, the trained machine learning predicts when cleaning or preventive maintenance will be needed.