The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2026
Filed:
Jul. 12, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Adel George Tannous, Santa Clara, CA (US);
Schubert S. Chu, San Francisco, CA (US);
Shu-Kwan Lau, Sunnyvale, CA (US);
Kartik Bhupendra Shah, Saratoga, CA (US);
Zuoming Zhu, Sunnyvale, CA (US);
Ala Moradian, Sunnyvale, CA (US);
Surajit Kumar, San Jose, CA (US);
Srinivasa Rangappa, Bangalore, IN;
Chia Cheng Chin, Fremont, CA (US);
Vishwas Kumar Pandey, Madhya Pradesh, IN;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A batch processing chamber and a process kit for use therein are provided. The process kit includes an outer liner having an upper outer liner and a lower outer liner, an inner liner, and a top plate and a bottom plate attached to an inner surface of the inner liner. The top plate and the bottom plate form an enclosure together with the inner liner, and a cassette is disposed within the enclosure. The cassette including shelves configured to retain a plurality of substrates thereon. The inner liner has inlet openings disposed on an injection side of the inner liner and configured to be in fluid communication with a gas injection assembly of a processing chamber, and outlet openings disposed on an exhaust side of the inner liner and configured to be in fluid communication with a gas exhaust assembly of the processing chamber. The inner surfaces of the enclosure comprise material configured to cause black-body radiation within the enclosure.