Penghui Xu

Title: Innovations by Penghui Xu in Semiconductor Manufacturing

Introduction

Penghui Xu is a prominent inventor based in Hefei, China, recognized for his significant contributions to the field of semiconductor manufacturing. With a total of 20 patents to his name, Xu has established himself as a key figure in shaping innovations in this high-tech industry.

Latest Patents

Among his recent patents, Xu has developed a manufacturing method for semiconductor structures. This innovative process involves creating an insulating layer comprised of both a first and second dielectric layer. A protective layer is applied to the upper surface of the second dielectric layer, covering the bottom and sidewalls of a first trench. The method includes strategically removing portions of the protective layer to expose the second dielectric layer, employing a first wet etching process that selectively etches the second dielectric layer relative to the first dielectric layer. Furthermore, this method features a second wet etching process to remove the protective layer, with an enhanced etch selectivity, ensuring precision in semiconductor fabrication.

Another notable patent outlines a method for forming a semiconductor structure. This process involves stacking a base, insulating layer, and mask layer sequentially to create regions with specific trench configurations. The innovative approach includes forming a protective layer over the mask layer, removing it in stages, and carefully managing the composition of the layers throughout to achieve optimal results.

Career Highlights

Penghui Xu currently works at Changxin Memory Technologies, Inc., where he focuses on advancing semiconductor technologies. His expertise in semiconductor manufacturing has garnered attention and recognition within the industry, contributing to the company's mission of developing cutting-edge memory solutions.

Collaborations

Throughout his career, Xu has collaborated with notable colleagues, including Qiang Wan and Tao Liu. These partnerships have facilitated the exchange of ideas and fostered a collaborative environment that enhances innovation in semiconductor technologies.

Conclusion

Penghui Xu's dedication to innovation in semiconductor manufacturing is evident through his extensive patent portfolio and collaborative efforts. His work at Changxin Memory Technologies, Inc. positions him as a leading inventor in the industry, and his contributions continue to shape the future of semiconductor technology.