The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2025
Filed:
Sep. 23, 2022
Changxin Memory Technologies, Inc., Hefei, CN;
Qiang Wan, Hefei, CN;
Jun Xia, Hefei, CN;
Kangshu Zhan, Hefei, CN;
Sen Li, Hefei, CN;
Tao Liu, Hefei, CN;
Penghui Xu, Hefei, CN;
CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei, CN;
Abstract
Embodiments provide a method for fabricating an array structure of a columnar capacitor and a semiconductor structure, relating to the field of semiconductor manufacturing technology. In the method, before a mask layer is removed, a thickness of the mask layer in the peripheral region is first adjusted to be equal to a thickness of the mask layer in the array region, thereby avoiding damage to a top support layer caused by different thicknesses of the mask layer. Moreover, in the method, a thickness of the top support layer is increased by means of a supplementary support layer, to increase support strength of the top support layer, thereby further preventing occurrence of tilt of the columnar capacitor due to insufficient support strength of the top support layer.