Location History:
- Milpitas, CA (US) (1993)
- Sunnyvale, CA (US) (1994)
- San Jose, CA (US) (1999 - 2017)
Company Filing History:
Years Active: 1993-2017
Title: The Innovative Contributions of Paul L. Deaton
Introduction
Paul L. Deaton, an accomplished inventor based in Milpitas, California, has made significant strides in the field of semiconductor technology. With a total of 14 patents to his name, Deaton’s work has been instrumental in advancing manufacturing and lithography systems. He is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry.
Latest Patents
One of Deaton's notable recent patents is for a vapor deposition system that pertains to photoresist applications. This innovative system features a vacuum chamber containing a heating element and a cooled chuck to hold a substrate. The vacuum chamber is equipped with a heated inlet, while the vapor deposition system is employed to volatilize a precursor into the vacuum chamber. This process condenses a photoresist over the substrate, which is cooled by the chuck. The resulting semiconductor wafer system includes both a semiconductor wafer and a vapor-deposited photoresist. Furthermore, the system is designed to support an extreme ultraviolet lithography setup, which consists of an extreme ultraviolet light source, a mirror for directing the light, a reticle stage for imaging, and a wafer stage for positioning the semiconductor wafer.
Career Highlights
Throughout his career, Paul L. Deaton has focused his efforts on enhancing semiconductor wafer production technologies. His innovative patents have been crucial in addressing the needs of modern manufacturing, which demand higher efficiency and precision. Deaton's contributions have enabled the development of advanced lithography systems essential for producing increasingly complex microelectronic devices.
Collaborations
In his professional journey, Deaton has had the privilege of collaborating with noteworthy colleagues, including Timothy Weidman and Timothy B. Michaelson. These collaborations have further enriched his work and contributed to the successful development of innovative technologies in the semiconductor field.
Conclusion
Paul L. Deaton stands out as a pivotal figure in semiconductor innovation. With a remarkable portfolio of patents and a commitment to advancing manufacturing techniques, his impact on the industry remains profound. His work at Applied Materials, Inc., alongside his talented colleagues, continues to shape the future of semiconductor technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.