Location History:
- Yamanashi, JP (2006 - 2020)
- Nirasaki, JP (2007 - 2020)
Company Filing History:
19 out of 10,295 
2 out of 101 
1 out of 35,658 
Years Active: 2006-2020
Title: Innovations of Noriyuki Kobayashi: A Pioneer in Plasma Technology
Introduction: Noriyuki Kobayashi, hailing from Nirasaki, Japan, is an accomplished inventor known for his significant contributions to plasma technology. With a total of 21 patents to his name, Kobayashi has played a pivotal role in advancing techniques that are vital to various industries, particularly in semiconductor manufacturing.
Latest Patents: Among his latest innovations are the "Plasma Etching Apparatus and Method" and "Plasma Processing Apparatus and Method." The plasma etching apparatus features a second electrode designed to support a target substrate, incorporating a second RF power supply unit for ion attraction. This system is managed by a control mechanism with an RF controller that adeptly switches between continuous and power modulation modes. The plasma processing method involves a comprehensive etching process where an etching gas is supplied into a process container, utilizing RF power for plasma generation. During the etching, a negative DC voltage is applied to enhance self-bias on the upper electrode, contributing to improved processing efficiency.
Career Highlights: Noriyuki Kobayashi has worked with esteemed companies such as Tokyo Electron Limited and NEC Corporation, where he has applied his expertise to develop pioneering technologies in plasma processes. His career reflects a deep commitment to innovation and providing solutions for complex manufacturing challenges.
Collaborations: Throughout his career, Kobayashi has collaborated with notable colleagues, including Akira Koshiishi and Masaru Sugimoto, who have shared insights and expertise that have further propelled his work in the industry.
Conclusion: With his remarkable portfolio of patents and significant career contributions, Noriyuki Kobayashi stands as a key figure in the field of plasma technology. His innovations continue to influence the semiconductor industry, showcasing the vital role of inventors in driving technological advancement.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.