Noboru Ohtani

Title: Noboru Ohtani: Innovator in Silicon-Carbide Semiconductor Manufacturing

Introduction

Noboru Ohtani, based in Sanda, Japan, is a notable inventor with an impressive portfolio of 22 patents. His work primarily focuses on the advancements in semiconductor technology, particularly the manufacturing and treatment of silicon-carbide (SiC) substrates. Ohtani's innovations contribute significantly to the efficiency and effectiveness of semiconductor production, enabling better performance in various applications.

Latest Patents

Among Ohtani's latest patents is a method for manufacturing a silicon-carbide semiconductor element. This method involves utilizing a modified layer on a substrate that is removed through heating under silicon vapor pressure. The process includes several critical steps, such as epitaxial layer formation, ion implantation, and ion activation. A second removal step ensures the elimination of macro-step bunching and inadequate ion-implanted portions from the substrate surface, enabling the successful formation of electrodes.

Another significant patent involves the treatment of the silicon-carbide substrate's surface. This method includes a removal step where a modified layer produced by polishing is eliminated by heating under silicon vapor pressure. The approach allows high etching rates in the first removal step while maintaining a low rate in the second step, thus preventing excessive removal of the epitaxial layer.

Career Highlights

Noboru Ohtani has earned recognition through his tenure at prestigious companies such as Nippon Steel Corporation and Sharp Corporation. His role in these organizations has facilitated substantial advancements in semiconductor technology and manufacturing processes. Ohtani's innovative work in the field has established him as a prominent figure in semiconductor engineering.

Collaborations

Throughout his career, Ohtani has collaborated with notable colleagues, including Tatsuo Fujimoto and Masashi Nakabayashi. These collaborations have undoubtedly enriched his research, fostering an environment of innovation and creativity in semiconductor technologies.

Conclusion

Noboru Ohtani stands out as a forward-thinking inventor in the semiconductor industry. His contributions through various patents and collaborative efforts reflect his commitment to advancing technology. With ongoing innovations in silicon-carbide semiconductor manufacturing, Ohtani continues to influence the future of electronic components, paving the way for enhanced performance and efficiency in numerous applications.