Michito Sato

Title: Michito Sato: Innovator in Wafer Polishing Technology

Introduction

Michito Sato is a prominent inventor based in Nishigo-mura, Japan. He has made significant contributions to the field of wafer polishing technology, holding a total of 17 patents. His innovative methods and apparatuses have advanced the efficiency and effectiveness of wafer polishing processes.

Latest Patents

One of Sato's latest patents is a method and apparatus for polishing wafers. This method aims to correct the shape of a polished wafer by pressing it against a polishing pad while continuously supplying a polishing composition containing water. The process involves measuring the shape of the polished wafer before correction, determining the appropriate surfactant concentration, and performing correction-polishing to minimize shape variations. Another notable patent is a polishing apparatus equipped with a waste liquid receiver. This apparatus includes a turntable with a polishing pad, a polishing head for holding the wafer, and a mechanism for circulating the polishing agent. The design allows for efficient collection and reuse of the polishing agent, enhancing the overall polishing process.

Career Highlights

Throughout his career, Michito Sato has worked with notable companies such as Shin-Etsu Handotai Co., Ltd. and SEH America, Inc. His experience in these organizations has contributed to his expertise in wafer polishing technologies.

Collaborations

Sato has collaborated with esteemed colleagues, including Kaoru Ishii and Junichi Ueno. These partnerships have fostered innovation and development in the field of wafer polishing.

Conclusion

Michito Sato's contributions to wafer polishing technology through his patents and collaborations highlight his role as a key innovator in the industry. His work continues to influence advancements in the field, ensuring more efficient and effective polishing processes.