The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 11, 2020

Filed:

Oct. 02, 2015
Applicants:

Shin-etsu Handotai Co., Ltd., Tokyo, JP;

Fujikoshi Machinery Corp., Nagano-shi, Nagano, JP;

Inventors:

Michito Sato, Nishigo-mura, JP;

Yosuke Kanai, Nagano, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 37/34 (2012.01); F16M 11/10 (2006.01); F16M 11/42 (2006.01); B24B 37/24 (2012.01); B62B 3/02 (2006.01); H01L 21/677 (2006.01); H01L 21/687 (2006.01); H01L 21/304 (2006.01); A47B 3/10 (2006.01); B24B 37/04 (2012.01);
U.S. Cl.
CPC ...
B24B 37/34 (2013.01); F16M 11/10 (2013.01); F16M 11/42 (2013.01); H01L 21/67712 (2013.01); H01L 21/67718 (2013.01); H01L 21/67724 (2013.01); H01L 21/6875 (2013.01); H01L 21/68707 (2013.01); A47B 3/10 (2013.01); B24B 37/04 (2013.01); H01L 21/304 (2013.01);
Abstract

A turn table transport carriage configured to carry a turn table removed from a polishing apparatus or turn table which is to be disposed to the polishing apparatus, turn table transport carriage including a turn table holding section configured to hold the turn table, support base which supports the turn table holding section from a lower side, elevating mechanism which moves up and down the turn table holding section, and inclination mechanism which inclines the turn table holding section holding the turn table, the turn table transport carriage being characterized by enabling carrying the turn table in a state where the turn table holding section holding the turn table is inclined by the inclination mechanism. Consequently, there is provided the turn table transport carriage which has a narrow width at the time of carrying the turn table and can reduce a width of a passage for carrying the turntable.


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