The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 29, 2018

Filed:

Sep. 22, 2014
Applicant:

Shin-etsu Handotai Co., Ltd., Tokyo, JP;

Inventors:

Junichi Ueno, Shirakawa, JP;

Michito Sato, Nishigo-mura, JP;

Kaoru Ishii, Shirakawa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 53/00 (2006.01); B24B 53/017 (2012.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
B24B 53/017 (2013.01); H01L 21/02024 (2013.01);
Abstract

A dressing apparatus for dressing a urethane foam pad, for use in polishing, by bringing diamond abrasive grains into sliding contact with the urethane foam pad, includes a support for holding the grains. The grains have multiple grit sizes, and include a high-grit diamond abrasive grain with a grit size of #170 or more and a low-grit diamond abrasive grain with a grit size of #140 or less. The grains are held by the support such that height positions of dressing surfaces of the grains are on the same plane. The dressing surfaces come into contact with the urethane foam pad. As a result, a dressing apparatus is capable of sufficiently roughening the surface of the urethane foam pad by one-time dressing without closing holes of the foaming part of the urethane foam pad, enabling short dressing time, long dressing interval, and inhibition of lowering of productivity.


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