Location History:
- Clifton Park, NY (US) (2008 - 2012)
- Albany, NY (US) (2008 - 2013)
- Nirasaki, JP (2012 - 2019)
- Yamanashi, JP (2011 - 2024)
Company Filing History:
Years Active: 2008-2025
Title: Innovations of Masamichi Hara: A Pioneer in Substrate Processing Technology
Introduction
Masamichi Hara, an accomplished inventor from Nirasaki, Japan, holds an impressive portfolio of 31 patents. His contributions to the field of substrate processing technology have significantly advanced the industry, showcasing his expertise and innovative spirit.
Latest Patents
Among his latest innovations, Hara has developed a unique substrate stage that incorporates an advanced thermocouple. This stage includes a body with a substrate placing surface, where the thermocouple is designed to detect temperature near the substrate's surface. The temperature measuring unit of the thermocouple utilizes a first and a second metal film stacked together, enhancing accuracy and efficiency.
Additionally, Hara has contributed to the development of a substrate processing apparatus that features a mounting table designed to attract and securely hold substrates using electrostatic forces. This apparatus includes a charge amount measurement unit for assessing the charge of the substrate attraction surface and a mechanism for neutralizing the charge, ensuring optimal processing conditions.
Career Highlights
Masamichi Hara is currently working at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His innovations have been instrumental in enhancing the performance and reliability of substrate processing technologies, which are critical in electronics production.
Collaborations
Throughout his career, Hara has collaborated with distinguished colleagues such as Atsushi Gomi and Yasushi Mizusawa. Their collective expertise has fostered an environment of innovation, leading to groundbreaking advancements in substrate processing technology.
Conclusion
Masamichi Hara's contributions to the field of substrate processing reflect his dedication to innovation and excellence. With a robust portfolio of patents and collaborations with esteemed colleagues, he continues to impact the industry positively, making significant strides in technology and processing efficiency.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.