The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2024
Filed:
Apr. 07, 2020
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Masamichi Hara, Yamanashi, JP;
Yasuyuki Kagaya, Yamanashi, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67103 (2013.01); H01L 21/6833 (2013.01);
Abstract
A substrate stage includes: a stage body having a substrate placing surface on which a substrate is placed in a processing apparatus that performs a processing on the substrate; and a thermocouple configured to detect a temperature near the substrate placing surface of the stage body. The thermocouple includes a temperature measuring unit formed by stacking a first metal film and a second metal film, on a surface on a side of the substrate placing surface of the stage body.