The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2016
Filed:
Mar. 08, 2011
Masamichi Hara, Nirasaki, JP;
Kaoru Yamamoto, Nirasaki, JP;
Atsushi Gomi, Nirasaki, JP;
Satoshi Taga, Koshi, JP;
Masamichi Hara, Nirasaki, JP;
Kaoru Yamamoto, Nirasaki, JP;
Atsushi Gomi, Nirasaki, JP;
Satoshi Taga, Koshi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
The disclosed deposition device for forming a thin film using a starter gas comprising an organic metal compound is provided with: a processing container; a mounting platformwhich has a heaterfor heating the workpiece W; a gas introduction mechanismwhich introduces the starter gas toward the area more exterior than the outer peripheral end of the workpiece W on the mounting platform; an internal partition wallwhich is disposed such that the lower end of said processing space contacts the mounting platformto form gas outletsbetween the lower portion of the space and the edges of the mounting platform; and a orifice forming memberwhich extends radially inward toward the mounting platformand forms an orificecommunicating with the gas outlet