The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 2015
Filed:
Apr. 20, 2012
Masamichi Hara, Nirasaki, JP;
Atsushi Gomi, Nirasaki, JP;
Shinji Maekawa, Nirasaki, JP;
Satoshi Taga, Nirasaki, JP;
Kaoru Yamamoto, Nirasaki, JP;
Masamichi Hara, Nirasaki, JP;
Atsushi Gomi, Nirasaki, JP;
Shinji Maekawa, Nirasaki, JP;
Satoshi Taga, Nirasaki, JP;
Kaoru Yamamoto, Nirasaki, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A substrate mounting mechanism on which a target substrate is placed is provided. The substrate mounting mechanism includes a heater plate, which has a substrate mounting surface on which the target substrate is placed and has a heater embedded therein to heat the substrate to a deposition temperature at which a film is deposited. The substrate mounting mechanism also includes a temperature control jacket, which is formed to cover at least a surface of the heater plate other than the substrate mounting surface and adjusts the temperature to a non-deposition temperature below the deposition temperature.