This inventor holds 55 USPTO granted patents and 11 published patent applications, primarily in Photolithography Techniques (CPC class G03F). Top assignees: Tokyo Electron Limited, Texas Instruments Corporation, Osaka University. Active years: 2005-2024.
Inventors with similar research interests:
Location History:
- Richardson, TX (US) (2005 - 2012)
- Austin, TX (US) (2009 - 2022)
- Hillsboro, OR (US) (2021 - 2024)
Company Filing History:
47 out of 10,850Â 
8 out of 29,845Â 
1 out of 1,039Â 
Years Active: 2005-2024
Areas of Expertise:
Title: Innovations and Contributions of Mark H. Somervell
Introduction
Mark H. Somervell, an accomplished inventor based in Richardson, TX, has made significant contributions to the field of semiconductor technology. With an impressive portfolio of 55 patents, Somervell's innovative methodologies are crucial in advancing the capabilities of microelectronic processing systems.
Latest Patents
Somervell's latest patents demonstrate his expertise and focus on enhancing chemical processes in semiconductor manufacturing. One of his notable patents involves "Chemical amplification methods and techniques for developable bottom anti-reflective coatings and dyed implant resists." This disclosure outlines techniques for using Photosensitized Chemically Amplified Resist Chemicals (PS-CAR) to pattern light-sensitive films. The innovative two-step exposure process aims to achieve higher acid concentration within photoresist layers, optimizing the performance of anti-reflective coatings on semiconductor substrates.
Additionally, he contributed to the creation of methods and systems to "monitor, control, and synchronize dispense systems." This patent details approaches using pressure and flow rate sensors to identify delays in flow changes and synchronize dispense operations effectively. These advancements are essential for ensuring precision in processing systems for microelectronic workpieces.
Career Highlights
Throughout his career, Somervell has worked with esteemed companies such as Tokyo Electron Limited and Texas Instruments Corporation. His experiences in these leading firms have provided him with the platform to research and develop cutting-edge technologies that have wide-reaching applications in the electronics industry.
Collaborations
During his professional journey, Somervell has collaborated with notable coworkers like Benjamen M. Rathsack and Michael Carcasi. These partnerships have facilitated the exchange of ideas and innovations, further strengthening the impact of their collective work in semiconductor technology.
Conclusion
Mark H. Somervell's contributions to the field of patentable inventions have positioned him as a key figure in semiconductor innovation. With an impressive number of patents that reflect his commitment to improving technological processes in the microelectronics domain, Somervell continues to push the boundaries of what is possible in semiconductor manufacturing. His work serves as an inspiration for future inventors and engineers aiming to innovate and excel in this dynamic industry.