The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2023
Filed:
Sep. 29, 2020
Tokyo Electron Limited, Tokyo, JP;
Michael Carcasi, Austin, TX (US);
Joshua Hooge, Austin, TX (US);
Mark Somervell, Hillsboro, OR (US);
Hiroyuki Iwaki, Tokyo, JP;
Masahide Tadokoro, Kumamoto, JP;
Masashi Enomoto, Kumamoto, JP;
Joel Estrella, Austin, TX (US);
Yuichiro Kunugimoto, Kumamoto, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
Camera images may be utilized to detect substrate edges and provide information regarding the centering of the substrate within the fluid dispense system. Camera images may also be utilized to monitoring the location of a cup within the fluid dispense system. The signal processing techniques utilized may include data smoothing, analyzing only certain wavelengths of reflected energy, transforming the data (in one embodiment utilizing a Fourier transform), and/or analyzing a sub-set of the collected pixels of data. The camera image data collected herein may be combined with a wide variety of other data so as to better monitor, characterize and/or control a substrate processing process flow.