Michael Carcasi

This inventor holds 49 USPTO granted patents and 17 published patent applications and 1 EPO patent, primarily in Photoresist Technology. Top assignees: Tokyo Electron Limited, Osaka University. Active years: 2008-2026.

USPTO Granted Patents = 49 (Patent Applications = 17)

% Patents Active = 77.6

EPO Patents = 1 (Patent Applications = 1)

Average Co-Inventor Count = 2.7

ph-index = 6

Forward Citations = 563(Granted Patents)

Company Filing History:

49 out of 10,837

Tokyo Electron Limited

where one patent can have more than one assignee

Years Active: 2008-2026

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Areas of Expertise:

Photoresist

Chemical Amplification

Substrate Processing

Thermal Imaging

Wafer Inspection

Critical Dimension Control

EUV Shot Noise

Developer Drain Monitoring

Spin Process Analysis

Automated Video Detection

Photolithography

Metrology

49 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12736881 - Providing a barrier layer for photoresist processing (2026-09-15),

2. 12733457 - Systems and methods that use infrared (IR) spectroscopy to monitor process chemicals utilized in a semiconductor process (2026-09-08),

3. 12730265 - Surface relief grating performance and cost enhancements for augmented reality applications (2026-09-08),

4. 12660573 - Systems and methods for determining a fluid height and/or a fluid velocity on a spinning substrate (2026-06-16),

5. 12645143 - Method for multiple filtration of dispensing liquid in a liquid dispense system (2026-06-02),

6. 12488452 - Wafer bath imaging (2025-12-02),

7. 12424467 - Systems and methods for determining a localized fluid velocity on a spinning substrate by tracking movement of a tracer across the spinning substrate (2025-09-23),

8. 12226796 - Bath systems and methods thereof (2025-02-18),

9. 12165870 - Chemical amplification methods and techniques for developable bottom anti-reflective coatings and dyed implant resists (2024-12-10),

10. 12123778 - Thermal imaging sensor for integration into track system (2024-10-22),

11. 11998945 - Methods and systems to monitor, control, and synchronize dispense systems (2024-06-04),

12. 11738363 - Bath systems and methods thereof (2023-08-29),

13. 11703459 - System and method to calibrate a plurality of wafer inspection system (WIS) modules (2023-07-18),

14. 11637031 - Systems and methods for spin process video analysis during substrate processing (2023-04-25),

15. 11624607 - Hardware improvements and methods for the analysis of a spinning reflective substrates (2023-04-11),

Title: Inventor Michael Carcasi

Introduction: Michael Carcasi is a renowned inventor based in Austin, Texas, known for his groundbreaking contributions to various industries.

Latest Patents: Michael Carcasi holds several patents in the fields of technology, healthcare, and consumer products, showcasing his diverse range of innovative ideas.

Career Highlights: With a career spanning over two decades, Michael Carcasi has established himself as a leading figure in the world of innovation. His ability to think outside the box and create solutions to complex problems has earned him recognition globally.

Collaborations: Throughout his career, Michael Carcasi has collaborated with top companies, research institutions, and universities to bring his inventions to life. His collaborative spirit has led to the development of cutting-edge technologies that have impacted numerous sectors.

Conclusion: Michael Carcasi's passion for innovation and his relentless drive to push the boundaries of what is possible make him a true pioneer in the field of inventing. His work continues to inspire the next generation of inventors and shape the future of technology.