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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12488452 B1

PDFFull Text
Date of Patent:
Dec. 02, 2025

Filed:

Jun. 16, 2021

Wafer bath imaging

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Joel Estrella, Austin, TX (US);

Ihsan Simms, Austin, TX (US);

Michael Carcasi, Austin, TX (US);

Joshua Hooge, Austin, TX (US);

Hiroshi Marumoto, Koshi, JP;

Assignee:

Tokyo Electron Limited, Tokyo, JP;

Attorney:

Slater Matsil LLP

Primary Examiner:

Oneal R Mistry

Assistant Examiner:

Duy undefined Tran

Int. Cl.
CPC ...
G06T 7/00 (2017.01); B08B 3/08 (2006.01); B08B 3/10 (2006.01); B08B 13/00 (2006.01); G06K 9/00 (2022.01); G06K 9/20 (2006.01); G06K 9/46 (2006.01); G06T 7/11 (2017.01); G06T 7/50 (2017.01); G06V 10/22 (2022.01); G06V 10/60 (2022.01); G06V 20/40 (2022.01); G10L 25/51 (2013.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G06T 7/001 (2013.01); B08B 3/08 (2013.01); B08B 3/106 (2013.01); B08B 13/00 (2013.01); G06T 7/11 (2017.01); G06T 7/50 (2017.01); G06V 10/22 (2022.01); G06V 10/60 (2022.01); G06V 20/46 (2022.01); G10L 25/51 (2013.01); H01L 21/67057 (2013.01); H01L 21/67253 (2013.01); B08B 2203/007 (2013.01); G06T 2207/10016 (2013.01); G06T 2207/20021 (2013.01); G06T 2207/30148 (2013.01); G06T 2207/30242 (2013.01);
Abstract

An exemplary method of monitoring a bath process includes processing a first wafer by submerging the first wafer within a bath solution; capturing a video of the bath solution containing the first wafer during a first time interval; analyzing the video based on intensity of light captured in a frame of the video; and based on analyzing the video, determining a first metric of the bath solution during the first time interval.

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Estrella, Joel. (2025). Wafer bath imaging (U.S. Patent No. 12488452). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12488452

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