The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2025
Filed:
Jul. 12, 2023
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Michael Carcasi, Austin, TX (US);
Ihsan Simms, Austin, TX (US);
Joel Estrella, Austin, TX (US);
Antonio Luis Pacheco Rotondaro, Austin, TX (US);
Joshua Hooge, Austin, TX (US);
Hiroshi Marumoto, Koshi, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05C 3/04 (2006.01); B05C 11/10 (2006.01); B05D 1/18 (2006.01); B08B 3/10 (2006.01); H01L 21/02 (2006.01); H01L 21/311 (2006.01);
U.S. Cl.
CPC ...
B05C 3/04 (2013.01); B05C 11/1002 (2013.01); B08B 3/106 (2013.01); H01L 21/0206 (2013.01); H01L 21/31111 (2013.01); B05D 1/18 (2013.01);
Abstract
A method of processing a plurality of substrates includes immersing the plurality of substrates into a bath solution contained in a bath chamber; generating gas bubbles in the bath solution; projecting light from a light source toward the bath chamber; generating light sensor data by capturing light emanating off the bath chamber after interacting with the gas bubbles with a light sensor; and converting the light sensor data into a metric for the bath solution.