Manjunath Subbanna

This inventor holds 11 USPTO granted patents and 8 published patent applications and 1 EPO patent. Top assignees: Applied Materials, Inc., Momentive Performance Materials Gmbh. Active years: 2019-2026.

USPTO Granted Patents = 11 (Patent Applications = 8)

% Patents Active = 54.5

EPO Patents = 1 (Patent Applications = 8)

Average Co-Inventor Count = 5.7

ph-index = 1

Forward Citations = 2(Granted Patents)

Company Filing History:

10 out of 14,391

Applied Materials, Inc.

patents

1 out of 590

Momentive Performance Materials Gmbh

patents

Years Active: 2019-2026

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11 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12721089 - Multi-zone lamp heating for chemical vapor deposition (2026-08-25),

2. 12700574 - Heat shield assemblies for minimizing heat radiation to pump of process chamber (2026-08-04),

3. 12696707 - Batch processing apparatus, systems, and related methods and structures for epitaxial deposition operations (2026-07-28),

4. 12660554 - Lamp heating module for an epitaxy process chamber (2026-06-16),

5. 12584218 - Plate assemblies, process kits, and processing chambers for semiconductor manufacturing (2026-03-24),

6. 12467144 - Methods of correlating zones of processing chambers, and related systems and methods (2025-11-11),

7. 12428731 - Flow guide structures and heat shield structures, and related methods, for deposition uniformity and process adjustability (2025-09-30),

8. 12091749 - Method for epitaxially depositing a material on a substrate by flowing a process gas across the substrate from an upper gas inlet to an upper gas outlet and flowing a purge gas from a lower gas inlet to a lower gas outlet (2024-09-17),

9. 12060651 - Chamber architecture for epitaxial deposition and advanced epitaxial film applications (2024-08-13),

10. 12018372 - Gas injector for epitaxy and CVD chamber (2024-06-25),

11. 10403806 - Light emitting diode assembly using thermal pyrolytic graphite for thermal management (2019-09-03),

Title: Manjunath Subbanna: Innovator in Processing Technologies

Introduction

Manjunath Subbanna is a notable inventor based in Bengaluru, India. He has made significant contributions to the field of processing technologies, holding a total of 11 patents. His work focuses on enhancing the efficiency and effectiveness of processing chambers through innovative methods and structures.

Latest Patents

One of his latest patents is titled "Methods of correlating zones of processing chambers, and related systems and methods." This patent describes a method for partitioning the processing volume into multiple zones, allowing for improved correlation and grouping of these zones based on specific parameters. Another significant patent is "Flow guide structures and heat shield structures, and related methods, for deposition uniformity and process adjustability." This invention involves an apparatus designed to optimize substrate processing by incorporating flow guide structures that enhance deposition uniformity.

Career Highlights

Throughout his career, Manjunath has worked with prominent companies such as Applied Materials, Inc. and Momentive Performance Materials GmbH. His experience in these organizations has allowed him to develop and refine his innovative ideas in processing technologies.

Collaborations

Manjunath has collaborated with notable professionals in his field, including Ala Moradian and Tetsuya Ishikawa. These collaborations have contributed to the advancement of his research and the successful development of his patents.

Conclusion

Manjunath Subbanna is a distinguished inventor whose work in processing technologies has led to several impactful patents. His innovative approaches continue to influence the industry and pave the way for future advancements.