The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2026
Filed:
May. 11, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Tetsuya Ishikawa, San Jose, CA (US);
Swaminathan T. Srinivasan, Pleasanton, CA (US);
Matthias Bauer, Sunnyvale, CA (US);
Ala Moradian, Sunnyvale, CA (US);
Manjunath Subbanna, Bangalore, IN;
Kartik Bhupendra Shah, Saratoga, CA (US);
Kostiantyn Achkasov, Bernin, FR;
Errol Antonio C. Sanchez, Tracy, CA (US);
Michael R. Rice, Pleasanton, CA (US);
Marc Shull, San Jose, CA (US);
Ji-Dih Hu, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
The present disclosure generally relates to an epitaxial chamber for processing of semiconductor substrates. In one example, the epitaxial chamber has a chamber body assembly. The chamber body assembly includes a lower window and an upper window, wherein chamber body assembly, the lower window and the upper window enclose an internal volume. A susceptor assembly is disposed in the internal volume. The epitaxial chamber also has a plurality of temperature control elements. The plurality of temperature control elements include one or more of an upper lamp module, a lower lamp module, an upper heater, a lower heater, or a heated gas passage.