Ji-Dih Hu

Title: Ji-Dih Hu: Innovator in Substrate Processing Technologies

Introduction

Ji-Dih Hu is a prominent inventor based in San Jose, CA, known for his significant contributions to substrate processing technologies. With a total of 7 patents, he has developed innovative methods and apparatuses that enhance the efficiency and effectiveness of processing chambers.

Latest Patents

One of Ji-Dih Hu's latest patents is titled "Methods and apparatus for measuring edge ring temperature." This invention involves an apparatus designed to measure the temperature of an assembly within a process chamber. The apparatus features a light pipe that redirects infrared radiation emitted from the assembly, along with an optical assembly that collimates, filters, and focuses this radiation. Additionally, it includes an optical detector that generates signals representing the infrared radiation, a temperature circuit that converts these signals into temperature values, and a controller that adjusts process parameters based on the temperature readings.

Another notable patent is "Methods, systems, and apparatus for optically monitoring individual lamps." This invention provides a method for monitoring individual lamps in substrate processing chambers to determine if they require replacement. The method utilizes cameras coupled with a borescope to capture images of the lamps, which are then analyzed for changes in mean light pixel intensity. An alert is generated if a significant change is detected, ensuring timely maintenance of the lamps.

Career Highlights

Ji-Dih Hu is currently employed at Applied Materials, Inc., a leading company in the field of materials engineering. His work focuses on developing advanced technologies that improve substrate processing, making significant impacts in the industry.

Collaborations

Throughout his career, Ji-Dih Hu has collaborated with notable colleagues, including Dongming Iu and Wolfgang R. Aderhold. These collaborations have contributed to the advancement of innovative solutions in substrate processing technologies.

Conclusion

Ji-Dih Hu's contributions to the field of substrate processing are marked by his innovative patents and collaborative efforts. His work continues to influence the industry, showcasing the importance of innovation in technology development.