The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2025
Filed:
Dec. 20, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Zuoming Zhu, Sunnyvale, CA (US);
Ala Moradian, Sunnyvale, CA (US);
Shu-Kwan Lau, Sunnyvale, CA (US);
Manjunath Subbanna, Bangalore, IN;
Errol Antonio C. Sanchez, Tracy, CA (US);
Abhishek Dube, Fremont, CA (US);
Erika R. Warrick, San Jose, CA (US);
Martin Jeffrey Salinas, San Jose, CA (US);
Chandra Mohapatra, San Jose, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
The present disclosure relates to methods of correlating zones of processing chambers, and related systems and methods. In one implementation, a method of correlating zones of a processing chamber includes partitioning the processing volume into a plurality of zones along a first direction of the processing volume and a second direction of the processing volume. The second direction intersects the first direction. The plurality of zones have a first zone number (m), and a second zone number (n). The method includes determining a group number. The determining of the group number includes multiplying a first value by a second value. The first value correlates to a first zone number (m) of a plurality of zones and the second value correlates to a second zone number (n) of the plurality of zones. The method includes grouping the zones into groups having a number that is equal to the group number.