Company Filing History:

12 out of 164,197

International Business Machines Corporation

Years Active: 2009-2017

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14 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 9726977 - Coating compositions suitable for use with an overcoated photoresist (2017-08-08),

2. 9465290 - Near-infrared absorbing film compositions (2016-10-11),

3. 9012133 - Removal of alkaline crystal defects in lithographic patterning (2015-04-21),

4. 8772376 - Near-infrared absorbing film compositions (2014-07-08),

5. 8652762 - Organic graded spin on BARC compositions for high NA lithography (2014-02-18),

6. 8586283 - Near-infrared absorbing film compositions (2013-11-19),

7. 8557501 - Developable bottom antireflective coating compositions especially suitable for ion implant applications (2013-10-15),

8. 8546062 - Self-forming top anti-reflective coating compositions and, photoresist mixtures and method of imaging using same (2013-10-01),

9. 8293451 - Near-infrared absorbing film compositions (2012-10-23),

10. 8182978 - Developable bottom antireflective coating compositions especially suitable for ion implant applications (2012-05-22),

11. 8137874 - Organic graded spin on BARC compositions for high NA lithography (2012-03-20),

12. 8097401 - Self-forming top anti-reflective coating compositions and, photoresist mixtures and method of imaging using same (2012-01-17),

13. 7816069 - Graded spin-on organic antireflective coating for photolithography (2010-10-19),

14. 7588879 - Graded spin-on organic antireflective coating for photolithography (2009-09-15),

Title: The Innovative Contributions of Libor Vyklicky

Introduction

Libor Vyklicky is a notable inventor based in Yorktown Heights, NY (US). He has made significant contributions to the field of coatings and materials science, holding a total of 14 patents. His work focuses on developing advanced coating compositions and near-infrared absorbing films, which have applications in various industries.

Latest Patents

Among his latest patents, Vyklicky has developed coating compositions suitable for use with an overcoated photoresist. These organic coating compositions, particularly antireflective coatings, can be developed with an aqueous alkaline developer, allowing for a single-step development process of an overcoated photoresist layer. His preferred coating compositions include a tetrapolymer that comprises at least four distinct functional groups. Additionally, he has created near-infrared absorbing film compositions, which consist of a curable liquid formulation that includes near-infrared absorbing polymethine dyes, crosslinkable polymers, and casting solvents. This invention also encompasses solid near-infrared absorbing films and methods for patterning a photoresist layer coated on a microelectronic substrate.

Career Highlights

Libor Vyklicky has worked with prominent companies in the technology sector, including IBM and Globalfoundries Inc. His experience in these organizations has allowed him to contribute to cutting-edge research and development in the field of microelectronics and materials.

Collaborations

Throughout his career, Vyklicky has collaborated with esteemed colleagues such as Dario Leonardo Goldfarb and Wu-Song S Huang. These collaborations have further enriched his work and expanded the impact of his inventions.

Conclusion

Libor Vyklicky is a distinguished inventor whose innovative work in coating compositions and near-infrared absorbing films has made a significant impact in the field of materials science. His contributions continue to influence advancements in technology and microelectronics.

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