The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2009
Filed:
Mar. 05, 2008
Colin J. Brodsky, Salt Point, NY (US);
Sean D. Burns, Hopewell Junction, NY (US);
Dario L. Goldfarb, Mohegan Lake, NY (US);
Michael Lercel, Austin, TX (US);
David R. Medeiros, Ossining, NY (US);
Dirk Pfeiffer, Dobbs Ferry, NY (US);
Daniel P. Sanders, San Jose, CA (US);
Steven A. Scheer, Austin, TX (US);
Libor Vyklicky, Yorktown Heights, NY (US);
Colin J. Brodsky, Salt Point, NY (US);
Sean D. Burns, Hopewell Junction, NY (US);
Dario L. Goldfarb, Mohegan Lake, NY (US);
Michael Lercel, Austin, TX (US);
David R. Medeiros, Ossining, NY (US);
Dirk Pfeiffer, Dobbs Ferry, NY (US);
Daniel P. Sanders, San Jose, CA (US);
Steven A. Scheer, Austin, TX (US);
Libor Vyklicky, Yorktown Heights, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
An antireflective coating that contains at least two polymer components and comprises chromophore moieties and transparent moieties is provided. The antireflective coating is useful for providing a single-layer composite graded antireflective coating formed beneath a photoresist layer.