The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2013
Filed:
Sep. 10, 2012
Martin Glodde, Yorktown Heights, NY (US);
Dario L. Goldfarb, Yorktown Heights, NY (US);
Wu-song Huang, Hopewell Junction, NY (US);
Wai-kin LI, Hopewell Junction, NY (US);
Sen Liu, Hopewell Junction, NY (US);
Pushkara R. Varanasi, Hopewell Junction, NY (US);
Libor Vyklicky, Yorktown Heights, NY (US);
Martin Glodde, Yorktown Heights, NY (US);
Dario L. Goldfarb, Yorktown Heights, NY (US);
Wu-Song Huang, Hopewell Junction, NY (US);
Wai-Kin Li, Hopewell Junction, NY (US);
Sen Liu, Hopewell Junction, NY (US);
Pushkara R. Varanasi, Hopewell Junction, NY (US);
Libor Vyklicky, Yorktown Heights, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A curable liquid formulation containing at least (i) one or more near-infrared absorbing triphenylamine-based dyes, and (ii) one or more casting solvents. The invention is also directed to solid near-infrared absorbing films composed of crosslinked forms of the curable liquid formulation. The invention is also directed to a microelectronic substrate containing a coating of the solid near-infrared absorbing film as well as a method for patterning a photoresist layer coated on a microelectronic substrate in the case where the near-infrared absorbing film is between the microelectronic substrate and a photoresist film.