The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 17, 2012
Filed:
Mar. 24, 2009
Wu-song Huang, Brewster, NY (US);
Irene Popova, Beacon, NY (US);
Pushkara Rao Varanasi, Poughkeepsie, NY (US);
Libor Vyklicky, Yorktown Heights, NY (US);
Wu-Song Huang, Brewster, NY (US);
Irene Popova, Beacon, NY (US);
Pushkara Rao Varanasi, Poughkeepsie, NY (US);
Libor Vyklicky, Yorktown Heights, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A composition of matter. The composition of matter includes a polymer having an ethylenic backbone and comprising a first monomer having an aromatic moiety, a second monomer having a base soluble moiety or an acid labile protected base soluble moiety, and a third monomer having a fluoroalkyl moiety. Also a photoresist formulation including the composition of matter and a method of imaging using the photoresist formulation including the composition of matter.