The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2017
Filed:
Feb. 08, 2010
James F. Cameron, Cambridge, MA (US);
Jin Wuk Sung, Northborough, MA (US);
John P. Amara, Reading, MA (US);
Greogory P. Prokopowicz, Worcester, MA (US);
David A. Valeri, Leominster, MA (US);
Libor Vyklicky, Yorktown Heights, NY (US);
Wu-song S. Huang, Brewster, NY (US);
Wenjie LI, Poughkeepsie, NY (US);
Pushkara R. Varanasi, Poughkeepsie, NY (US);
Irene Y. Popova, Beacon, NY (US);
James F. Cameron, Cambridge, MA (US);
Jin Wuk Sung, Northborough, MA (US);
John P. Amara, Reading, MA (US);
Greogory P. Prokopowicz, Worcester, MA (US);
David A. Valeri, Leominster, MA (US);
Libor Vyklicky, Yorktown Heights, NY (US);
Wu-Song S. Huang, Brewster, NY (US);
Wenjie Li, Poughkeepsie, NY (US);
Pushkara R. Varanasi, Poughkeepsie, NY (US);
Irene Y. Popova, Beacon, NY (US);
GlobalFoundries Inc., Grand Cayman, KY;
Abstract
Organic coating compositions, particularly antireflective coating compositions, are provided that can be developed with an aqueous alkaline developer, including in a single step during development of an overcoated photoresist layer. Preferred coating compositions comprise a tetrapolymer that comprises at least four distinct functional groups.