The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7816069 B1

PDF
Full Text
Expired
Date of Patent:
Oct. 19, 2010

Filed:

Jun. 23, 2006
Applicants:

Colin J. Brodsky, Salt Point, NY (US);

Sean D. Burns, Hopewell Junction, NY (US);

Dario L. Goldfarb, Mohegan Lake, NY (US);

Michael Lercel, Austin, TX (US);

David R. Medeiros, Ossining, NY (US);

Dirk Pfeiffer, Dobbs Ferry, NY (US);

Daniel P. Sanders, San Jose, CA (US);

Steven A. Scheer, Austin, TX (US);

Libor Vyklicky, Yorktown Heights, NY (US);

Inventors:

Colin J. Brodsky, Salt Point, NY (US);

Sean D. Burns, Hopewell Junction, NY (US);

Dario L. Goldfarb, Mohegan Lake, NY (US);

Michael Lercel, Austin, TX (US);

David R. Medeiros, Ossining, NY (US);

Dirk Pfeiffer, Dobbs Ferry, NY (US);

Daniel P. Sanders, San Jose, CA (US);

Steven A. Scheer, Austin, TX (US);

Libor Vyklicky, Yorktown Heights, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/11 (2006.01); G03C 1/00 (2006.01); C08L 29/04 (2006.01); C08L 27/12 (2006.01);
U.S. Cl.
CPC ...
Abstract

An antireflective coating that contains at least two polymer components and comprises chromophore moieties and transparent moieties is provided. The antireflective coating is useful for providing a single-layer composite graded antireflective coating formed beneath a photoresist layer.


Find Patent Forward Citations

Brodsky, Colin. (2010). Graded spin-on organic antireflective coating for photolithography (U.S. Patent No. 7816069). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7816069

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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