The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2014
Filed:
Mar. 19, 2012
Dario L. Goldfarb, Mohegan Lake, NY (US);
Libor Vyklicky, Yorktown Heights, NY (US);
Sean D. Burns, Hopewell Junction, NY (US);
David R. Medeiros, Yorktown Heights, NY (US);
Daniel P. Sanders, San Jose, CA (US);
Robert D. Allen, San Jose, CA (US);
Dario L. Goldfarb, Mohegan Lake, NY (US);
Libor Vyklicky, Yorktown Heights, NY (US);
Sean D. Burns, Hopewell Junction, NY (US);
David R. Medeiros, Yorktown Heights, NY (US);
Daniel P. Sanders, San Jose, CA (US);
Robert D. Allen, San Jose, CA (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
An antireflective coating that contains at least two polymer components and comprises chromophore moieties and transparent moieties is provided. The antireflective coating is useful for providing a single-layer composite graded antireflective coating formed beneath a photoresist layer.